# Mechanics and Physics of Precise Vacuum Mechanisms (Fluid Mechanics and Its Applications #91) (Hardcover)

Contents; Preface; About the Authors; 1 Using Precise Mechanisms in Modern Vacuum Technological Equipment;References; 2 Typical Vacuum Mechanisms; 2.1 Functions of Vacuum Mechanisms 2.2 Rotary-Motion Feedthroughs; 2.3 Linear-Motion Feedthrough; 2.4 Manipulators; 2.5 Micro Mechanisms; References; 3 Friction in Vacuum; 3.1 Friction Coefficients of Different Materials in Atmosphere and in Vacuum; 3.2 Dry Friction Laws in Atmosphere and in Vacuum;3.3 The Main Factors, which Determine the Surface Coverage at "Dry" Friction; 3.3.1 Influence of the Residual Pressure and Temperature; 3.3.2 Influence of the Sliding Velocity and Roughness Geometry; 3.4 The Theoretical Analysis of Friction in the Different Ranges of Coverage; 3.4.1 Viscous Component of a Friction Force; 3.4.2 Capillary Component of a Friction Force; 3.4.3 Adhesive-Viscous Friction; 3.4.4 Adhesive Friction; 3.4.5 Cohesion Friction; 3.5 The Possibility to Use the Described Method for the Calculation of the Friction Coefficient of Real Surfaces; 3.6 Exchange of Gases at Friction in Vacuum References; 4 Matrix Method of the Design of New Mechanisms Structure; 4.1 The Stages of the Matrix Method of the Mechanisms Generation; 4.2 The List of the Parameters of Vacuum Mechanisms Which Are Used in Matrix Analysis; 4.2.1 The First (Highest) Level Parameters; 4.2.2 The Second Level Parameters; 4.2.3 The Third Level Parameters; 4.2.4 The Fourth Level Parameters; 4.3 Algorithm of the Matrix Method of the Generation of New Mechanisms; References; 5 Precision of Vacuum Mechanisms; 5.1 The Constituents of Errors of Vacuum Mechanisms; 5.2 The Basic Positions of the Precision Theory of Vacuum Mechanisms; 5.2.1 Open-Loop-Controlled Drive; 5.2.2 Completely Loop-Controlled Drive; 5.3 Determination of the Error Components of Different Origins; 5.3.1 Calculation of the Kinematic Component of the Error; 5.3.2 Calculation of the Error from Elastic Deformations; 5.3.3 Calculation of the Error Caused by the Deformation of theThin-Wall Sealing Elements; 5.3.4 Calculation of the Positioning Error Caused by the Resistance Forces at Movement; 5.4 Summarizing the Components of different Types and Forms; 5.5 Correlation of Total Error of the Mechanisms with Economic Parameters; References; 6 Vacuum Mechanisms of Nanoscale Precision; 6.1 The Principles of Nanometer Precision of Vacuum Mechanisms; 6.2 Physical Effects Which Are Used for Vacuum Mechanisms of Nanometer Precision Creation; 6.2.1 Piezo Effect; 6.2.2 Magnetic and Electric Rheology Effects; 6.3 Vacuum Drives and Manipulators of Nanoscale Precision; 6.3.1 Vacuum Piezo Drives; 6.3.2 Multi-Coordinate Magnetic and Rheology Drives and Manipulators; References; 7 Ultrahigh Vacuum Rotary-Motion Feedthroughs; 7.1 Analysis of Design Variants of Thin-Wall Sealing Elements on Parameter "Manufacturability"; 7.2 Precision of Harmonic Gear Rotary Feedthroughs; 7.3 Longevity of Harmonic Gear Rotary Feedthrough; 7.4 Outgassing Flow of Harmonic Rotary-Motion Feedthrough; 7.5 Calculation of Hermetic Harmonic Gear Feedthrough; 7.5.1 Determinationof the Number of Teeth; 7.5.2 Calculation of Main Sizes of Flexible Gears; 7.5.3 Calculation of Control Rollers Size of Rigid Gear; 7.5.4 Calculation of Flexible Gear Geometry, Calculation of Geometry Sizes which Ensure Hermetic Properties of Flexible Gear; 7.5.5 Calculation of Assurance Factor of Flexible Gear Teeth; 7.5.6 Calculation of Flexible Gear Wave Generator; References; 8 Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs; 8.1 The Hermetic Drive Designs Principles Based on Non-Coaxial Nut-Screw Couples; 8.2 Geometry of Nut-Screw Coupling of Linear-Motion Hermetic Feedthrough; 8.3 Kinematic Calculation; 8.4 Force Calculation of Hermetic Feedthroughs Based on Non-Coaxial Nut-Screw Mechanisms; 8.5 System Losses and Efficiency Factor of Hermetic Feedthroughs Based on Non-Coaxial Nut-Screw Mechanisms; 8.6 Analysis of Loading Ability of Planetary Nut-Screw Feedthroughs; References; 9 Vacuum.

Prof. Evgueni A.DEULIN Evgueni A.Deulin born in Moscow on 9.07. 1938. He earned his first doctoral degree (PhD) 'Ultra High Vacuum (UHV) Mechanism Optimal Design"in 1987. He earned his second doctoral degree (Dr.Sci)"Theory ofUHV Mechanisms Creation" in 1987. From 1988 he works as a professor of Mechanical Engineering Department of BMSTU and leads student Vacuum Technology Research Group. His pupils earned 22 PhD works, During 1964-1989 E.A.Deulin researched all main types of UHV mechanisms and designed 54 types of standard (USSR) mechanical vacuum feedthroughs, including precise UHV harmonic rotary feedthrough, long travel UHV linear non-coaxial ones, precise (in nano scale range) multi coordinate magnetic rheology drives etc. He is author of 46 patents of USSR and Russia. E.A. Deulin researched the process of gases exchange at friction in vacuum. He was the first who theoretically ( in 1996) togather with prof. J de Segovia and with Dr. R. Nevshoupa described and experimentally researched the mechanically stimulated gases solution process.. In 1997 E.A. Deulin first time theoretically described phenomenon of friction force decreasing in UHV for " smooth" surfaces. Today this work transforms into "Theory of Smooth Surfaces Dry Friction". E.A. Deulin is the author ofmore than 250 scientific publications He is the supervisor of postgraduate students group and he was a winner of title "The Best Student Research Supervisor " in BMSTU. Prof. Yuri V. PANFILOV Yuri V. Panfilov born in Moscow on 02.01 . 1948. He earned his BS (engineer) degree in 1968 in Bauman Moscow State Technical University(BMSTU). He earned his first doctoral degree (PhD) "Research of Elastomer Feedthroughs for Vacuum Technological Equipement Automation"in 1970. He earned his second doctoral degree (Dr.Sci)" New Methods of Nanoscale Structures Creation" in 1988. From 1988 he works as a professor of Mechanical Engineering Department of BMSTU and heads the Chair of Bauman MoscowState Technical University (BMSTY) titled " Mecanical Engineering in Electronics". During 1970-2005 V.Panfilov researched all main types ofUHV equipment for thin films creation with different new proprties and methods of product parameters creation on nanoscale precision and he also created new methods of product defense in vacuum from dust microarticles which may be formed in vacuum, He organised a series of Russian Conferences and Workshops in area of nano technology He created a number of new methods of nano scale structures creation on the surface. including the methods of antiwear coverage on the surfaces of different materials. Y.V. Panfilov is the author of more than 200 scientific publications He is the author of 40 patents of Russia. Y.V.Panfilof is a president of Russian scientific society in area of nanotechnology. Prof. Valery P.MIKHAI1JOV Valery P.MiKhailov born in Moscow on 20. 0 1 . 1 96 1 . He earned his BS (engineer) degree in 1983 in Bauman Moscow State Technical University(BMSTU). He earned his first doctoral degree (PhD) " Research and Design of Multicoordinate Magneticrheology Drive of Submicron Precision for Installations of Electron beam Lytography" 'in 1995. He earned his second doctoral degree (Dr.Sci)"Automatic Control ofPositioning Process ofMagnetic Rheology Drives of Nanoscale Precision " in 2003. From 2003 From1995 he works as a docent and from 2003 as a professor of Mechanical Engineering Department of BMSTU. During 1985-1999 V.P. Michailov researched linear travel, non-coaxial, precise (in nano scale range) multi coordinate magnetic rheology drives.V.P. Mikhailov is the author of more than 150 scientific publications, He is author of 25 patents of USSR and Russia. V.P. Michailov is the supervisor of the group of postgraduate students which researh and create new methods of nanoscale precision drive control. Under supervision of V.P.Michailov the series of new multicoordinate drives of nanoscale precisionwas designed and researched. There were created multicoordinate drives for primary mirrors tuning of Russian new large optical telescope of 25 meter diameter. V.P. Mikhailov is a winner oftitle "The Best Student Supervisor and Lecturer " in BMSTU. Dr. Roman A. Nevshupa Roman A.Nevshupa was born in Krasnodar on 24.09. 1970. He graduated from Bauman Moscow State Technical University (BMSTU) in 1994. He earned his doctoral degree (PhD) "Increasing the reliability of vacuum rotary motion feedthroughs" 'in 1999. From 2003 he works as an Associate Professor at Mechanical Engineering Department of BMSTU. During 1992-2005 R.A. Nevshupa researched vacuum mechanisms, vacuum tribology, tribological coatings in vacuum, mechanically induced desorption and chemical reactions occurring in mechanical contact. R.A. Nevshupa is author of more 40 scientific publications. He is author of 2 patents in Russia and Japan. R.A. Nevshupa performed his researches as invited researcher in various laboratories including Microtribology laboratory at flmenau Technical University, Laboratory of Surface Physics and Engineering at Institute of Materials of Madrid, Mesotechnology Research Group at the National Institute of Advanced Industrial Science and Technology (Tsukuba, Japan).